Energy balance and temperature in a CO2-laser-produced plasma
نویسندگان
چکیده
منابع مشابه
Temperature and Expansion Energy of Laser Produced Plasmas
are given f o r three d i f ferent t emperatures . W e a s s u m e d a radiat ing v o l u m e V of 1 0 7 c m 3 which is a represen tative value f o r the v o l u m e o f the heat ing zone . T h e e l e c t r o n densit ies were taken f r o m the e x p r e s s i o n g iven in E q . ( 8 ) . P V is the total p o w e r of radiat ion emit ted b y the p l a s m a . F o r c o m p a r i s o n the laser...
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We investigated the role of prepulse laser wavelength on extreme-ultraviolet (EUV) emission and ionic debris generation. A 6 ns Nd:YAG laser operating at 266 nm was used to generate a pre-plasma that was then reheated by a 35 ns CO2 laser pumping pulse at 10.6 μm. At an ideal delay time, improvement in EUV conversion efficiency (CE) of up to 30 % was seen compared to the CE from the pumping pul...
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Plasma generated by fundamental radiation from a Nd:YAG laser focused onto a graphite target is studied spectroscopically. Measured line profiles of several ionic species were used to infer electron temperature and density at several sections located in front of the target surface. Line intensities of successive ionization states of carbon were used for electron temperature calculations. Stark ...
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Efficient laser systems are essential for the realization of high volume manufacturing in extreme ultraviolet lithography (EUVL). Solid-state Nd:YAG lasers usually have lower efficiency and source suppliers are alternatively investigating the use of high power CO2 laser systems. However, CO2 laser-produced plasmas (LPP) have specific characteristics and features that should be taken into accoun...
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ژورنال
عنوان ژورنال: Physics of Fluids
سال: 1984
ISSN: 0031-9171
DOI: 10.1063/1.864551